Heat treatment of cathodic arc deposited amorphous hard carbon films Academic Article uri icon


  • Amorphous hard carbon films of varying sp2/sp3 fractions were deposited on Si using filtered cathodic arc deposition with pulsed biasing. The films were heat treated in air at temperatures up to 550C. Raman investigation and nanoindentation were performed to study the modification of the films caused by the heat treatment. It was found that films containing a high sp3 fraction sustain their hardness for temperatures at least up to 400C, their structure for temperatures up to 500C, and show a low rate of material loss during heat treatment. Films containing a low sp3 fraction graphitize during heat treatment, show changes in structure and hardness, and have a high rate of material loss. 1997 Elsevier Science S.A.

published proceedings

  • Thin Solid Films

author list (cited authors)

  • Anders, S., Ager, J. W., Pharr, G. M., Tsui, T. Y., & Brown, I. G.

citation count

  • 51

complete list of authors

  • Anders, Simone||Ager, Joel W||Pharr, George M||Tsui, Ting Y||Brown, IG

publication date

  • October 1997