Preparation of ternary alloy libraries by means of thick film deposition and interdiffusion: Structure and mechanical properties Conference Paper uri icon


  • A method of preparing ternary alloy libraries for combinatorial materials development based on thick film deposition and interdiffusion was studied, using the Ni-Fe-Cr ternary system. Specimens were prepared by depositing films onto sapphire substrates with an e-beam evaporation system followed by annealing in a vacuum for interdiffusion. The specimens were examined using cross sectional scanning electron microscopy (SEM) with energy dispersive spectroscopy (EDS), scanning Auger microanalysis (SAM), angular resolved x-ray fluorescence (AR-XRF), x-ray diffraction (XRD), and nanoindentation. The method proved an effective way to make the alloy libraries for screening mechanical properties by means of nanoindentation.

published proceedings

  • Materials Research Society Symposium - Proceedings

author list (cited authors)

  • Rar, A., Specht, E. D., Meyer, H. M., Santella, M. L., George, E. P., & Pharr, G. M.

complete list of authors

  • Rar, A||Specht, ED||Meyer, HM||Santella, ML||George, EP||Pharr, GM

publication date

  • December 2003