Optical interferometric determination of in-plane residual stresses in SiO2 films on silicon substrates Academic Article uri icon

published proceedings

  • Materials Evaluation

author list (cited authors)

  • Ghaffari, K., Wang, B., Danyluk, S., Billone, M., & Pharr, G.

complete list of authors

  • Ghaffari, K||Wang, B||Danyluk, S||Billone, M||Pharr, G

publication date

  • October 1996