Optical interferometric determination of in-plane residual stresses in SiO2 films on silicon substrates
Academic Article
- Overview
- Additional Document Info
- View All
Overview
published proceedings
- Materials Evaluation
author list (cited authors)
- Ghaffari, K., Wang, B., Danyluk, S., Billone, M., & Pharr, G.
complete list of authors
- Ghaffari, K||Wang, B||Danyluk, S||Billone, M||Pharr, G
publication date
- October 1996
published in
- MATERIALS EVALUATION Journal