Effects of focused ion beam milling on the nanomechanical behavior of a molybdenum-alloy single crystal Academic Article uri icon


  • Nanoindentation was performed on a Mo-alloy single crystal to investigate effects of focused ion beam (FIB) milling on mechanical behavior. On a non-FIB-milled surface, pop-ins were observed on all load-displacement curves corresponding to a transition from elastic to plastic deformation. Similar pop-ins were not detected on surfaces subjected to FIB milling. This difference indicates that FIB milling introduces damage that obviates the need for dislocation nucleation during subsequent deformation. A second effect of FIB milling is that it increased the surface hardness. Together, these effects could be the source of the size effects reported in the literature on micropillar tests. © 2007 American Institute of Physics.

author list (cited authors)

  • Bei, H., Shim, S., Miller, M. K., Pharr, G. M., & George, E. P.

citation count

  • 125

publication date

  • September 2007