Effects of focused ion beam milling on the nanomechanical behavior of a molybdenum-alloy single crystal Academic Article uri icon


  • Nanoindentation was performed on a Mo-alloy single crystal to investigate effects of focused ion beam (FIB) milling on mechanical behavior. On a non-FIB-milled surface, pop-ins were observed on all load-displacement curves corresponding to a transition from elastic to plastic deformation. Similar pop-ins were not detected on surfaces subjected to FIB milling. This difference indicates that FIB milling introduces damage that obviates the need for dislocation nucleation during subsequent deformation. A second effect of FIB milling is that it increased the surface hardness. Together, these effects could be the source of the size effects reported in the literature on micropillar tests. 2007 American Institute of Physics.

published proceedings

  • Applied Physics Letters

author list (cited authors)

  • Bei, H., Shim, S., Miller, M. K., Pharr, G. M., & George, E. P.

citation count

  • 140

complete list of authors

  • Bei, H||Shim, S||Miller, MK||Pharr, GM||George, EP

publication date

  • September 2007