Scheduling Semiconductor Manufacturing Plants to Reduce Mean and Variance of Cycle-Time
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abstract
We address the problem of scheduling semiconductor manufacturing plants. The goal is to choose the lot release policy and the job scheduling policy so as to reduce the mean and variance of cycle-time. We introduce a new class of scheduling policies, called Fluctuation Smoothing policies. We have tested our policies on two models of semiconductor manufacturing plants. The first is the research and development fabrication line that has been examined earlier by Wein [5]. The second is an approximate model of a full scale production line. In comparison with our policies, the best previously known policies yield a 12.5% worse mean cycle-time, and a 45% worse standard deviation of cycle-time, on average. Statistical tests corroborate our conclusions.
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Proceedings. IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
