Scheduling Semiconductor Manufacturing Plants to Reduce Mean and Variance of Cycle-Time Conference Paper uri icon

abstract

  • We address the problem of scheduling semiconductor manufacturing plants. The goal is to choose the lot release policy and the job scheduling policy so as to reduce the mean and variance of cycle-time. We introduce a new class of scheduling policies, called Fluctuation Smoothing policies. We have tested our policies on two models of semiconductor manufacturing plants. The first is the research and development fabrication line that has been examined earlier by Wein [5]. The second is an approximate model of a full scale production line. In comparison with our policies, the best previously known policies yield a 12.5% worse mean cycle-time, and a 45% worse standard deviation of cycle-time, on average. Statistical tests corroborate our conclusions.

name of conference

  • Proceedings. IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

published proceedings

  • Proceedings. IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

author list (cited authors)

  • Lu, S., Ramaswamy, D., & Kumar, P. R.

citation count

  • 1

complete list of authors

  • Lu, SCH||Ramaswamy, D||Kumar, PR

publication date

  • January 1993