Mid-infrared Photonic Chips for Real-time Breath Biomarkers Analysis
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abstract
OSA 2018. Real-time gas analysis on-a-chip was demonstrated using a mid-infrared (mid-IR) microcavity. Optical apertures for the microcavity were made of ultrathin silicate membranes embedded in a silicon chip using the complementary metal-oxide-semiconductor (CMOS) process. CH4, CO2, and N2O were selected as analytes due to their strong absorption bands at = 3.25 - 3.50 m, 4.20 - 4.35 m.
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Biophotonics Congress: Biomedical Optics Congress 2018 (Microscopy/Translational/Brain/OTS)
