A multi-layer plastic/glass technology for microfluidic systems with integrated functionality
Additional Document Info
2003 IEEE. A multi-layer plastic/glass technology has been developed for microfluidic systems with integrated functionality. Hot embossing and heat staking of plastics, microstenciling of electrodes, and stereolithography (SLA) was combined with conventional MEMS fabrication techniques to realize the system. The approach enables the use of multiple plastic/glass materials in a single system, provides a solution for the integration of electrical functionality throughout the system, provides a mechanism for the inclusion of microvalves, and provides an interconnect technology for interfacing fluids and electrical components between the macro and the micro worlds.
name of conference
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)