A MEMS Singlet Oxygen Generator—Part II: Experimental Exploration of the Performance Space Academic Article uri icon


  • This paper reports the quantitative experimental exploration of the performance space of a microfabricated singlet oxygen generator (μSOG). SOGs are multiphase reactors that mix H 2 O 2 , KOH, and Cl 2 to produce singlet delta oxygen, or O 2 (a). A scaled-down SOG is being developed as the pump source for a microfabricated chemical oxygen-iodine laser system because scaling down a μSOG yields improved performance compared to the macroscaled versions. The performance of the μSOG was characterized using O 2 (a) yield, chlorine utilization, power in the flow, molar flow rate per unit of reactor volume, and steady-state operation as metrics. The performance of the μSOG is measured through a series of optical diagnostics and mass spectrometry. The test rig, which enables the monitoring of temperatures, pressures, and the molar flow rate of O 2 (a), is described in detail. Infrared spectra and mass spectrometry confirm the steady-state operation of the device. Experimental results reveal O 2 (a) concentrations in excess of 1017 cm-3, O 2 (a) yield at the chip outlet approaching 80%, and molar flow rates of O 2 (a) per unit of reactor volume exceeding 600 × 10-4 mol/L/s. © 2007 IEEE.

author list (cited authors)

  • Hill, T. F., Velásquez-García, L. F., Wilhite, B. A., Rawlins, W. T., Lee, S., Davis, S. J., ... Livermore, C.

citation count

  • 6

publication date

  • December 2007