Thin Film Technologies In Active Matrix Addressing System Of LCDs
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The success of Liquid Crystal Display (LCD) is recently one of the most important achievements in the flat panel display area. In addition to liquid crystal material improvements, the active matrix (AM) addressing system, prepared by the thin film technology, contributes a great deal to the success of LCDs. This paper identifies three major areas that are critical to the AM system: Structure, which includes conventional and novel multilayer devices; material, which covers semiconductors, dielectrics, metals, and organic polymers; and process, which contains unit processes such as deposition, etching, lithography, contact, planarization, self-alignment, and redundant structures. Each of these areas will be critically reviewed and discussed, with emphasis on recent thin film transistor developments. © 1989 SPIE.
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