ON THE EFFECT OF BONDED HYDROGEN IN THE LOCAL MICROSTRUCTURE OF PECVD SINX-H FILMS Conference Paper

abstract

• The effect of bonded hydrogen in the atomic microstructure of nitrogen-rich SiNx:H films is investigated using EXAFS. It is shown that when the hydrogen concentration is of the order of 30 at%, the measured NSi bond length is shorter than that in the reference nitride by 2-3% and the coordination number in the 1st neighbor shell is significantly lower than the expected value of 3. Furthermore, evidence is provided on the coexistence of an a-Si:N phase, the concentration of which depends on the deposition conditions. 1995.

authors

• Kuo, Yue

published proceedings

• PHYSICA B

author list (cited authors)

• PALOURA, E. C., KUO, Y., & BRAUN, W.

citation count

• 8

complete list of authors

• PALOURA, EC||KUO, Y||BRAUN, W

publication date

• March 1995

publisher

• Elsevier  Publisher

published in

• Physica B: Condensed Matter  Journal

keywords

• 51 Physical Sciences
• 5104 Condensed Matter Physics

Digital Object Identifier (DOI)

• 10.1016/0921-4526(94)00751-G

start page

• 562

end page

• 564

volume

• 208

issue

• 1-4

URL

• http://dx.doi.org/10.1016/0921-4526(94)00751-g