Microstructure-mechanical properties correlation in irradiated amorphous SiOC
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2017 Elsevier Ltd The microstructure and mechanical properties of amorphous silicon oxycarbide (SiOC) before and after irradiation were investigated using Fourier-transform infrared spectroscopy (FTIR), transmission electron microscopy (TEM), Rutherford backscattering spectrometry (RBS), nuclear reaction analysis and nano-indentation. SiOC films of different compositions were subjected 1 displacement per atom (dpa) He + irradiation. The irradiation results in a decrease of SiOSi bond angle and an increase of average coordination number. These microstructure variations are associated with increases of hardness and Young's modulus. Our findings reveal that mechanical properties correlate with the SiOSi bond angle and average coordination number in irradiated amorphous SiOC alloys.