A SEMICONDUCTOR WAFER REPRESENTATION DATABASE AND ITS USE IN THE PREDATOR PROCESS EDITOR AND STATISTICAL SIMULATOR Conference Paper uri icon

abstract

  • A description is given of a three-dimensional geometry and field database, called the chip database (CDB), for representing the results of IC process and device simulation, and its use in the PREDITOR process editor and statistical simulator. Using fast analytical models, process simulation and device parameter extraction for a CMOS inverter takes 1.3 s on a DECstation 3100, with database access taking 14-34% of that time.

name of conference

  • Proceedings of the 28th conference on ACM/IEEE design automation conference - DAC '91

published proceedings

  • 28TH ACM/IEEE DESIGN AUTOMATION CONFERENCE
  • Proceedings of the 28th conference on ACM/IEEE design automation conference - DAC '91

author list (cited authors)

  • WALKER, D., KELLEN, C. S., & STROJWAS, A. J.
  • Walker, D., Kellen, C. S., & Strojwas, A. J.

citation count

  • 6

complete list of authors

  • WALKER, DMH||KELLEN, CS||STROJWAS, AJ
  • Walker, DMH||Kellen, CS||Strojwas, AJ

publication date

  • January 1991