Model-based product quantity control
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A methodology for building Response Surface Models (RSM) for product quantity control of integrated circuits is presented. A simulation based approach is used to build the models. The work focuses on controlling the number of wafer starts devoted to each product based on in-line, in-situ and Wafer-level Electric Tests (WET). Real-time decisions are made depending on the demand for a particular performance bin.
author list (cited authors)
Ramakrishnan, V., & Walker, D.