Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition. Academic Article uri icon


  • Nanomechanical measurements of platinum-carbon 3D nanoscale architectures grown via focused electron beam induced deposition (FEBID) were performed using a nanoindentation system in a scanning electron microscope (SEM) for simultaneous in situ imaging. Compression tests were used to estimate the modulus of the platinum-carbon deposits to be in the range of 8.6-10.5 GPa. Cantilever arm bend tests resulted in a modulus estimation of 15.6 GPa. Atomic layer deposition was used to conformally coat FEBID structures with a thin film of Al2O3, which strengthened the structures and increased the measured modulus. Cycled load-displacement testing at various load rates of nano-truss structures was also performed, demonstrating a viscoelastic response in the FEBID material. Finally, load-displacement tests of a variety of 3-dimensional nanoarchitectures with and without Al2O3 coatings were measured.

published proceedings

  • Nanoscale

author list (cited authors)

  • Lewis, B. B., Mound, B. A., Srijanto, B., Fowlkes, J. D., Pharr, G. M., & Rack, P. D.

citation count

  • 23

complete list of authors

  • Lewis, Brett B||Mound, Brittnee A||Srijanto, Bernadeta||Fowlkes, Jason D||Pharr, George M||Rack, Philip D

publication date

  • November 2017