An analytical model for conveyor based AMHS in semiconductor wafer fabs Conference Paper

abstract

• This paper proposes an analytical model useful in the design of conveyor-based Automated Material Handling Systems (AMHS) to support semiconductor manufacturing. The objective is to correctly estimate the work-in-process on the conveyor and assess the system stability. The analysis approach is based on a queuing model, but takes into account details of the operation of the AMHS including turntables. A numerical example is provided to demonstrate and validate the queuing model over a wide range of operating scenarios. The results indicated that the analytical model estimates the expected work-in-process on the conveyor with reasonable accuracy.© 2008 IEEE.

name of conference

• 2008 Winter Simulation Conference (WSC)

authors

• Johnson, Andrew

published proceedings

• 2008 Winter Simulation Conference

author list (cited authors)

• Nazzal, D., Johnson, A., Carlo, H. J., & Jimenez, J. A.

citation count

• 13

complete list of authors

• Nazzal, Dima||Johnson, Andrew||Carlo, Hector J||Jimenez, Jesus A

publication date

• December 2008

publisher

• IEEE  Publisher

published in

• Proceedings of the ... Winter Simulation Conference. Winter Simulation Conference  Journal

Digital Object Identifier (DOI)

• 10.1109/wsc.2008.4736313

International Standard Book Number (ISBN) 13

• 978-1-4244-2707-9

start page

• 2148

end page

• 2155