Characterization Of Sputtered Magneto-Optic Thin Films
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Thin films of alloys in the Fe-Tb-Co-Gd quaternary have received considerable attention as candidates for optical read-write storage media. Although the magnetic properties of many different compositions of films have been examined, a systematic investigation of film composition has been tedious due the effort involved with fabrication of many different composite or alloy targets. Multi-target magnetron sputtering (MTS) offers a convenient method to easily prepare a wide range of thin film compositions. In this study, thin films in the Fe-Tb-X ternary (X = C or 0) have been prepared using MTS to examine the effects of two common sputtering system impurity elements, carbon and oxygen. The magnetic properties of these films, measured using a vibrating sample magnetometer, are correlated with the microstructural characteristics determined using optical and electron microscopy techniques. In addition, the effect of room temperature aging on the magnetic properties of thin films overcoated with carbon will be described. © 1987 SPIE.
author list (cited authors)
Frausto, P. R., Johnson, W. B., & Wickersham, C. E.
complete list of authors
Frausto, Philip R||Johnson, William B||Wickersham, Charles E