Theoretical and numerical modeling of a CMOS micromachined acoustic sensor Conference Paper

name of conference

• International Conference on Design and Test of Integrated Systems in Nanoscale Technology, 2006. DTIS 2006.

authors

• El Borgi, Sami

published proceedings

• IEEE DTIS: 2006 INTERNATIONAL CONFERENCE ON DESIGN & TEST OF INTEGRATED SYSTEMS IN NANOSCALE TECHNOLOGY, PROCEEDINGS

author list (cited authors)

• Mezghani, B., Haboura, K., Tounsi, F., Smaoui, S., El-Borgi, S., Choura, S., & Masmoudi, M.

citation count

• 2

complete list of authors

• Mezghani, B||Haboura, K||Tounsi, F||Smaoui, S||El-Borgi, S||Choura, S||Masmoudi, M

publication date

• January 2006

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

keywords

• Acoustic Sensor
• Cmos
• Micromachined
• Numerical Modeling
• Suspended Membrane

Digital Object Identifier (DOI)

• 10.1109/DTIS.2006.1708688

International Standard Book Number (ISBN) 10

• 0-7803-9726-6

start page

• 441

end page

• 444

URL

• http://dx.doi.org/10.1109/dtis.2006.1708688