High-intensity laser processing of thin films Conference Paper uri icon

name of conference

  • Laser Applications in Microelectronic and Optoelectronic Manufacturing VI

published proceedings

  • LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING VI

author list (cited authors)

  • Yakovlev, V. V., Magyar, J., Aita, C. R., Sklyarov, A., & Mikaylichenko, K.

citation count

  • 2

complete list of authors

  • Yakovlev, VV||Magyar, J||Aita, CR||Sklyarov, A||Mikaylichenko, K

editor list (cited editors)

  • Gower, M. C., Helvajian, H., Sugioka, K., & Dubowski, J. J.

publication date

  • June 2001