High-intensity laser processing of thin films Conference Paper

name of conference

• Laser Applications in Microelectronic and Optoelectronic Manufacturing VI

authors

• Yakovlev, Vladislav

published proceedings

• LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING VI

author list (cited authors)

• Yakovlev, V. V., Magyar, J., Aita, C. R., Sklyarov, A., & Mikaylichenko, K.

citation count

• 2

complete list of authors

• Yakovlev, VV||Magyar, J||Aita, CR||Sklyarov, A||Mikaylichenko, K

editor list (cited editors)

• Gower, M. C., Helvajian, H., Sugioka, K., & Dubowski, J. J.

publication date

• June 2001

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Proceedings of SPIE  Journal

keywords

• Ablation
• Ceramic
• Laser
• Phase Transformations
• Short Pulse
• Thin Films

Digital Object Identifier (DOI)

• 10.1117/12.432520

International Standard Book Number (ISBN) 10

• 0-8194-3952-5

start page

• 212

end page

• 221

volume

• 4274

URL

• http://dx.doi.org/10.1117/12.432520