Interaction of fine particles with laser-generated nonlinear surface acoustic waves Academic Article uri icon


  • The cleaning of a silicon surface from dust particles using laser-induced surface acoustic pulses is investigated. It is shown that nonlinear acoustic waves displace particles not only perpendicular but also parallel to the surface and are therefore more effective in particle removal than are linear acoustic waves.

published proceedings

  • Journal De Physique. IV : JP

author list (cited authors)

  • Mikhalevich, V. G., Kolomenskii, A. A., Benck, E. C., & Schuessler, H. A.

complete list of authors

  • Mikhalevich, VG||Kolomenskii, AA||Benck, EC||Schuessler, HA

publication date

  • July 1994