In situ monitoring platform for nanolithography by combining conducting probe atomic force microscopy and tip-enhanced Raman spectroscopy techniques
Conference Paper
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Overview
published proceedings
- ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
author list (cited authors)
- Chang, C., & Batteas, J. D.
complete list of authors
- Chang, Chi-Yuan||Batteas, James D
publication date
- January 2010