In situ monitoring platform for nanolithography by combining conducting probe atomic force microscopy and tip-enhanced Raman spectroscopy techniques Conference Paper uri icon

published proceedings

  • ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY

author list (cited authors)

  • Chang, C., & Batteas, J. D.

complete list of authors

  • Chang, Chi-Yuan||Batteas, James D

publication date

  • January 2010