Barium titanate nanocrystals and nanocrystal thin films: Synthesis, ferroelectricity, and dielectric properties
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Advanced applications for high k dielectric and ferroelectric materials in the electronics industry continues to demand an understanding of the underlying physics in decreasing dimensions into the nanoscale. We report the synthesis, processing, and electrical characterization of thin (< 100 nm thick) nanostructured thin films of barium titanate (BaTiO 3) built from uniform nanoparticles (<20 nm in diameter). We introduce a form of processing as a step toward the ability to prepare textured films based on assembly of nanoparticles. Essential to this approach is an understanding of the nanoparticle as a building block, combined with an ability to integrate them into thin films that have uniform and characteristic electrical properties. Our method offers a versatile means of preparing BaTiO 3 nanocrystals, which can be used as a basis for micropatterned or continuous BaTiO 3 nanocrystal thin films. We observe the BaTiO 3 nanocrystals crystallize with evidence of tetragonality. We investigated the preparation of well-isolated BaTiO 3 nanocrystals smaller than 10 nm with control over aggregation and crystal densities on various substrates such as Si, Si/SiO 2, Si 3N 4/Si, and Pt-coated Si substrates. BaTiO 3 nanocrystal thin films were then prepared, resulting in films with a uniform nanocrystalline grain texture. Electric field dependent polarization measurements show spontaneous polarization and hysteresis, indicating ferroelectric behavior for the BaTiO 3 nanocrystalline films with grain sizes in the range of 10-30 nm. Dielectric measurements of the films show dielectic constants in the range of 85-90 over the 1 KHz-100 KHz, with low loss. We present nanocrystals as initial building blocks for the preparation of thin films which exhibit highly uniform nanostructured texture and grain sizes. 2006 American Institute of Physics.
