Potential Application of Tip-Enhanced Raman Spectroscopy (TERS) in Semiconductor Manufacturing Conference Paper uri icon

abstract

  • 2015 SPIE. Tip-enhanced Raman spectroscopy (TERS), with nanometer spatial resolution, has the capability to monitor chemical composition, strain, and activated dopants and is a promising metrology tool to aid the semiconductor R&D processes. This paper addresses the major challenges which limit the application of TERS from routine measurement: the lack of comparability, reproducibility, calibration, and standardization. To address these issues, we have developed a robust test structure and the ability to generate high-quality tips using a high volume manufacturing (HVM) approach. The qualifying data will be presented.

name of conference

  • Metrology, Inspection, and Process Control for Microlithography XXIX

published proceedings

  • METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXIX

author list (cited authors)

  • Hung, P. Y., O'Loughlin, T. E., Lewis, A., Dechter, R., Samayoa, M., Banerjee, S., Wood, E. L., & Walker, A.

citation count

  • 6

complete list of authors

  • Hung, PY||O'Loughlin, Thomas E||Lewis, Aaron||Dechter, Rimma||Samayoa, Martin||Banerjee, Sarbajit||Wood, Erin L||Walker, Angela R Hight

editor list (cited editors)

  • Cain, J. P., & Sanchez, M. I.

publication date

  • March 2015