Extraction of SiN ions from source of negative ions by cesium sputtering Academic Article

abstract

• We investigated the production of SiN- ions from a source of negative ions by cesium sputtering (SNICS) ion source. Currents up to 17 A were obtained by optimizing the operation parameters such as the cathode voltage, ionizer current, temperature of the cesium reservoir and fine turning the focussing system. Damage and damage annealing of low energy SiN- implanted in silicon are also studied and reported in this presentation. 2005 Elsevier B.V. All rights reserved.

authors

• Shao, Lin

published proceedings

• Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

author list (cited authors)

• Wang, X. M., Liu, J. R., Shao, L., Ma, K. B., Chen, H., Yu, X. K., & Chu, W. K.

citation count

• 1

complete list of authors

• Wang, XM||Liu, JR||Shao, L||Ma, KB||Chen, H||Yu, XK||Chu, WK

publication date

• December 2005

publisher

• Elsevier  Publisher

published in

• Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms  Journal

Digital Object Identifier (DOI)

• 10.1016/j.nimb.2005.07.146

start page

• 885

end page

• 889

volume

• 241

issue

• 1-4

URL

• http://dx.doi.org/10.1016/j.nimb.2005.07.146