Measurements of the stopping powers of He ions incident along the different channel axes and channel planes of Si Academic Article uri icon

abstract

  • One serious issue limiting the accuracy of Rutherford backscattering spectrometry (RBS) is that the stopping powers of channeled and non-channeled particles differ substantially. Consequently, it brings errors not only in the energy-depth conversion of RBS spectra, but also in the quantitative analysis of the disorder profile. In this study, we present measurements of the stopping powers of 4He+ ions channeled along crystallographic axes of Si1 0 0, 1 1 0, 1 1 1, and also along crystallographic planes of (1 0 0) and (1 1 0) in the energy region of 0.6-2 MeV. The aim of this study is to provide an accurate energy-depth conversion for channeling RBS data. 2006 Elsevier B.V. All rights reserved.

published proceedings

  • Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

author list (cited authors)

  • Shao, L., Wang, Y. Q., Nastasi, M., & Mayer, J. W.

citation count

  • 14

complete list of authors

  • Shao, Lin||Wang, YQ||Nastasi, M||Mayer, JW

publication date

  • August 2006