Cross-sections of 10B(, p)13C nuclear reaction for boron analysis Academic Article uri icon

abstract

  • The 10B(, p)13C nuclear reaction shows great potential in boron depth profiling due to its large cross-section and a narrow resonance in the MeV energy range. Unfortunately, the existing cross-section data on this reaction are too rough for depth profiling. We present an accurate measurement of the cross-section of the (, p) reaction on 10B using a boron thin film on a Si substrate, high-resolution detection and careful analysis of the proton spectra. Angular distributions of the cross-section at the resonant energy Er = 1512 keV are also presented. The sharp resonance at 1512 keV was used to measure the B depth distribution in a borophosphosilicate glass (BPSG) thin film. The boron concentration profiles are compared with SIMS measurement and are found in good agreement. 2003 Elsevier B.V. All rights reserved.

published proceedings

  • Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

author list (cited authors)

  • Chen, H., Wang, X. M., Shao, L., Liu, J. R., Yen, A. C., & Chu, W.

citation count

  • 8

complete list of authors

  • Chen, H||Wang, XM||Shao, L||Liu, JR||Yen, AC||Chu, Wei-kan

publication date

  • September 2003