Cross-sections of 10B(, p)13C nuclear reaction for boron analysis
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The 10B(, p)13C nuclear reaction shows great potential in boron depth profiling due to its large cross-section and a narrow resonance in the MeV energy range. Unfortunately, the existing cross-section data on this reaction are too rough for depth profiling. We present an accurate measurement of the cross-section of the (, p) reaction on 10B using a boron thin film on a Si substrate, high-resolution detection and careful analysis of the proton spectra. Angular distributions of the cross-section at the resonant energy Er = 1512 keV are also presented. The sharp resonance at 1512 keV was used to measure the B depth distribution in a borophosphosilicate glass (BPSG) thin film. The boron concentration profiles are compared with SIMS measurement and are found in good agreement. 2003 Elsevier B.V. All rights reserved.