Thermal stability of diamondlike carbon buried layer fabricated by plasma immersion ion implantation and deposition in silicon on insulator Academic Article uri icon

published proceedings

  • Journal of Applied Physics

author list (cited authors)

  • Di, Z., Huang, A., Fu, R., Chu, P. K., Shao, L., Hchbauer, T., ... Lin, C.

complete list of authors

  • Di, Zengfeng||Huang, Anping||Fu, Ricky KY||Chu, Paul K||Shao, Lin||Höchbauer, T||Nastasi, M||Zhang, Miao||Liu, Weili||Shen, Qinwo||Luo, Suhua||Song, Zhitang||Lin, Chenglu