Thermal stability of diamondlike carbon buried layer fabricated by plasma immersion ion implantation and deposition in silicon on insulator
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Journal of Applied Physics
author list (cited authors)
Di, Z., Huang, A., Fu, R., Chu, P. K., Shao, L., Hchbauer, T., ... Lin, C.
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Di, Zengfeng||Huang, Anping||Fu, Ricky KY||Chu, Paul K||Shao, Lin||Höchbauer, T||Nastasi, M||Zhang, Miao||Liu, Weili||Shen, Qinwo||Luo, Suhua||Song, Zhitang||Lin, Chenglu
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40 Engineering
4018 Nanotechnology
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