A model for damage caused by cluster implantation: Non-linear effect due to damage overlap Academic Article

abstract

• We have developed a mathematical approach to predict the non-linear damages caused by cluster ion-solid interaction. It is based on the Gibbons overlap model, and assuming that two cascades must overlap to form complete disorder and that the level of overlapping is determined by the volume ratio between the cascade from a single atom and the averaged cascades of atoms in the cluster. The calculated results agree well with our experimental data. 2005 Elsevier B.V. All righs reserved.

authors

• Nastasi, Michael
• Shao, Lin

published proceedings

• Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

author list (cited authors)

• Shao, L., Nastasi, M., Wang, X., Liu, J., & Chu, W.

citation count

• 12

complete list of authors

• Shao, Lin||Nastasi, Michael||Wang, Xuemei||Liu, Jiarui||Chu, Wei-Kan

publication date

• January 2006

publisher

• Elsevier  Publisher

published in

• Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms  Journal

Digital Object Identifier (DOI)

• 10.1016/j.nimb.2005.08.194

start page

• 503

end page

• 505

volume

• 242

issue

• 1-2

URL

• http://dx.doi.org/10.1016/j.nimb.2005.08.194