Metal gate: HfO2 metal-oxide-semiconductor structures on high-indium-content InGaAs substrate using physical vapor deposition Academic Article uri icon

author list (cited authors)

  • Ok, I., Kim, H., Zhang, M., Zhu, F., Park, S., Yum, J., ... Lee, J. C.

citation count

  • 3

complete list of authors

  • Ok, InJo||Kim, H||Zhang, M||Zhu, F||Park, S||Yum, J||Zhao, H||Garcia, Domingo||Majhi, Prashant||Goel, N||Tsai, W||Gaspe, CK||Santos, MB||Lee, Jack C

publication date

  • March 2008