Influence of the substrate orientation on the electrical and material properties of GaAs metal-oxide-semiconductor capacitors and self-aligned transistors using HfO2 and silicon interface passivation layer Academic Article uri icon

author list (cited authors)

  • Ok, I., Kim, H., Zhang, M., Zhu, F., Park, S., Yum, J., ... Lee, J. C.

citation count

  • 10

publication date

  • May 2008