Development of vertical planar coil inductors using plastic deformation magnetic assembly (PDMA)
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This paper presents the results of the development of a vertical planar coil inductor. The planar coil inductor is first fabricated on silicon substrate and then assembled to the vertical position by using a novel 3-Dimensional bath-scale self-assembly process (Plastic Deformation Magnetic Assembly (PDMA)). Inductors of different dimensions are fabricated and tested. The S-parameters of the inductors before and after PDMA are measured and compared, demonstrating superior performance due to reduced substrate effects and also increased substrate space savings for the vertical planar coil inductors.
name of conference
2001 IEEE MTT-S International Microwave Symposium Digest
2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157)
author list (cited authors)
Jun Zou, .., Nickel, J. G., Trainor, D., Chang Liu, .., & Schutt-Aine, J. E.
complete list of authors
Nickel, JG||Trainor, D||Schutt-Aine, JE