Inductor design for monolithic DC-DC converters
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Optimal design of passives is important for realization of monolithic dc-dc converters. This paper discusses ideas for integrating inductors onto a silicon chip. Expressions for trace resistance and inductance estimation of on-chip spiral inductors will be compared. Based on these expressions, planar spiral inductors will be designed for use in monolithic dc-dc buck converters. An out-of-plane technology that uses a surface micromachining technique, known as plastic deformation magnetic assembly, is used to erect high quality inductors with small footprints. Experimental results from buck converters with each inductor are presented.
author list (cited authors)
Musunuri, S., Chapman, P. L., Zou, J., & Liu, C.