Conductivity-based contact sensing for probe arrays in dip-pen nanolithography Academic Article

abstract

• This letter reports a contact sensing method for dip-pen nanolithography which functions by monitoring the conductivity between the lithography probe and the substrate. Experimental results show that this method has high sensitivity and is suitable for dip-pen nanolithography applications with large probe arrays.

authors

• Zou, Jun

published proceedings

• Applied Physics Letters

altmetric score

• 6

author list (cited authors)

• Zou, J., Bullen, D., Wang, X., Liu, C., & Mirkin, C. A.

citation count

• 17

complete list of authors

• Zou, Jun||Bullen, David||Wang, Xuefeng||Liu, Chang||Mirkin, Chad A

publication date

• July 2003

publisher

• AIP Publishing  Publisher

published in

• Applied Physics Letters  Journal

keywords

• 40 Engineering
• 4018 Nanotechnology

Digital Object Identifier (DOI)

• 10.1063/1.1592620

start page

• 581

end page

• 583

volume

• 83

issue

• 3

URL

• http://dx.doi.org/10.1063/1.1592620