Development of a wide‐tuning‐range two‐parallel‐plate tunable capacitor for integrated wireless communication systems
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This paper reports on the development of a micromachined parallel-plate tunable capacitor with a wide tuning range. Different from conventional two-parallel-plate tunable capacitors, this tunable capacitor consists of one suspended top plate and two fixed bottom plates. One fixed plate and the top plate form a variable capacitor, while the other one provides necessary electrostatic actuation. Among the fabricated prototype devices, a maximum controllable tuning range of 69.8%@1 MHz has been obtained experimentally, exceeding the theoretical limit (50%) of conventional two-parallel-plate tunable capacitors. A component quality factor (Q) of 30@5 GHz and a self-resonant frequency far beyond 5 GHz have been achieved. The fabrication process is compatible with the existing standard IC (integrated circuit) technology, which makes it suitable for integrated wireless communication applications. © 2001 John Wiley & Sons, Inc. Int J RF and Microwave CAE.
author list (cited authors)
Zou, J., Liu, C., & Schutt‐Ainé, J. E.