Optical properties of micromachined polysilicon reflective surfaces with etching holes
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MUMPS (Multi-User MEMS Process) is receiving increasingly wide use in micro optics. We have investigated the optical properties of the polysilicon reflective surface in a typical MUMPS chip within the visible light spectrum. The effect of etching holes on the reflected laser beam is studied. The reflectivity and diffraction patterns at five different wavelengths have been measured. The optical properties of the polysilicon reflective surface are greatly affected by the surface roughness, the etching holes, as well as the material. The etching holes contribute to diffraction and reduction of reflectivity. This study provides a basis for optimal design of micromachined free-space optical systems.
name of conference
Micromachining and Microfabrication
author list (cited authors)
Zou, J., Byrne, C., Liu, C., & Brady, D. J.
complete list of authors
Zou, Jun||Byrne, Colin||Liu, Chang||Brady, David J
editor list (cited editors)