Development of a novel micro electromechanical tunable capacitor with a high tuning range Academic Article uri icon


  • A new parallel-plate tunable capacitor designh with a tuning range greater than 50% limit imposed by the pull-in effect is described. This new design has been validated previously by finite element analysis and simulation using MEMCAD 4.0.

published proceedings

  • Annual Device Research Conference Digest

author list (cited authors)

  • Zou, J., & Liu, C.

complete list of authors

  • Zou, J||Liu, C

publication date

  • January 2000