Development of a novel micro electromechanical tunable capacitor with a high tuning range

abstract

• A new parallel-plate tunable capacitor designh with a tuning range greater than 50% limit imposed by the pull-in effect is described. This new design has been validated previously by finite element analysis and simulation using MEMCAD 4.0.

authors

• Zou, Jun

published proceedings

• Annual Device Research Conference Digest

author list (cited authors)

• Zou, J., & Liu, C.

complete list of authors

• Zou, J||Liu, C

publication date

• January 2000

start page

• 111

end page

• 112