Development of a MEMS vertical planar coil inductor Conference Paper uri icon


  • This paper presents the results of the development of a vertical planar coil inductor. The planar coil inductor is first fabricated on silicon substrate and then assembled to the vertical position by using a novel 3-Dimensional bath-scale self-assembly process (Plastic Deformation Magnetic Assembly (PDMA)). Inductors of different dimensions are fabricated and tested. The S-parameters of the inductors before and after PDMA are measured and compared, demonstrating superior performance due to reduced substrate effects and also increased substrate space savings for the vertical planar coil inductors.

published proceedings

  • 2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

author list (cited authors)

  • Chen, J., Zou, J., Liu, C., & Kang, S. M.

complete list of authors

  • Chen, J||Zou, J||Liu, C||Kang, SM

publication date

  • December 2002