Parallel dip-pen nanolithography with arrays of individually addressable cantilevers Academic Article

abstract

• For dip-pen lithography (DPN), developmemt of thermally actuated probe arrays of individually addressable cantilevers were discussed. The array consists of ten probes, each of 300μm length with 100μm lateral spacing. The actuation process was done by passing 10mA of dc current through 2.1mW of heating power to the probes. It was observed that by using 1-octadecanethiol (ODT) as the ink, and a 20nm substrate of evaporated gold film on an oxidized silicon wafer, parallel writing capabilities of ten probes were demonstrated.

authors

• Zou, Jun

altmetric score

• 9

author list (cited authors)

• Bullen, D., Chung, S., Wang, X., Zou, J., Mirkin, C. A., & Liu, C.

citation count

• 94

publication date

• February 2004

publisher

• AIP Publishing  Publisher

published in

• Applied Physics Letters  Journal

Digital Object Identifier (DOI)

• 10.1063/1.1644317

start page

• 789

end page

• 791

volume

• 84

issue

• 5