Integrated microfluidic linking chip for scanning probe nanolithography
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abstract
The methods for inking scanning probes for direct soft lithography in microfluidic chip were investigated. The microfluidic chip consists of thin film poly (dimethylsiloxane) (PDMS). Thin PDMS membranes were used as inkpads and minimized the evaporation of the ink and cross contamination between the inking sites. It was concluded that the inking chip provides high-density inking, easy loading of inks and reduced evaporation loss.