Integrated microfluidic linking chip for scanning probe nanolithography Academic Article uri icon

abstract

  • This letter reports an architecture for a microfluidic chip that dresses (inks) multiple nanolithography tips in a high-density array in a parallel and multiplexed fashion. The microfluidic chip consists of multiple precision patterned thin-film poly(dimethylsiloxane) (PDMS) patches serving as porous inking pads. Inking chemicals are supplied from loading reservoirs to the inking pads through microfluidic channels. The gas-permeable thin PDMS membranes allow ink molecules to diffuse through while preventing bulk liquid from overflowing or evaporating. The inking chip provides high-density inking, easy loading of inks, and reduced evaporation losses. We present the fabrication process and inking of scanning probe contact printing probes and commercial nitride probes.

published proceedings

  • Applied Physics Letters

altmetric score

  • 3

author list (cited authors)

  • Ryu, K. S., Wang, X., Shaikh, K., Bullen, D., Goluch, E., Zou, J., Liu, C., & Mirkin, C. A.

citation count

  • 27

complete list of authors

  • Ryu, Kee Suk||Wang, Xuefeng||Shaikh, Kashan||Bullen, David||Goluch, Edgar||Zou, Jun||Liu, Chang||Mirkin, Chad A

publication date

  • July 2004