Micromachined arrayed dip pen nanolithography probes for sub-100nm direct chemistry patterning Conference Paper uri icon

abstract

  • We report the development of micromachined passive and active probe arrays for parallel dip pen nanolithography (DPN). DPN is a soft lithography method that allows direct, mask-less deposition of chemicals onto substrates with sub 100-nm resolution. An active DPN probe with thermal bimetallic actuation has been developed and tested. Lithographic results and an analytical tool for optimizing active probe designs with respect to a number of performance criteria are also demonstrated.

author list (cited authors)

  • Bullen, D., Wang, X., Zou, J., Hong, S., Chung, S. W., Ryu, K., ... Liu, C.

publication date

  • July 2003