DESIGN AND DEVELOPMENT OF A ROTATING WAFER SCANNER Academic Article

authors

• Kalafatis, Stavros

published proceedings

• OPTICAL ENGINEERING

author list (cited authors)

• KALAFATIS, S., OHANLON, J. F., & GROSS, K. P.

citation count

• 1

complete list of authors

• KALAFATIS, S||OHANLON, JF||GROSS, KP

publication date

• January 1993

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Optical Engineering  Journal

keywords

• Particle Detection
• Wafer Scanning

Digital Object Identifier (DOI)

• 10.1117/12.60850

start page

• 420

end page

• 424

volume

• 32

issue

• 2