Comparison of Effective Work Function Extraction Methods Using Capacitance and Current Measurement Techniques Academic Article uri icon

abstract

  • The effective work function (EWF) extracted on terraced oxide structures by capacitance-voltage-based techniques was compared with the work function calculated from the barrier height extracted by current-voltage measurements. The results show a reasonable correlation-within ± 0.1 eV - in the EWF values for various metal gate electrodes, validating both techniques for EWF extraction. © 2006 IEEE.

author list (cited authors)

  • Wen, H., Choi, R., Brown, G. A., BösckeBoscke, T., Matthews, K., Harris, H. R., ... Lee, B. H.

citation count

  • 29

publication date

  • July 2006