An approach to multilayer microfluidic systems with integrated electrical, optical, and mechanical functionality
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In this paper, a general solution is presented for the realization of microfluidic systems containing multiple compartments with sequential functions. The approach utilizes multilayer plastic/glass/silicon microfluidic system configurations with integrated electrical, optical, and fluid control functionalities. The approach allows for the integration of on-column, on-chip electrical conductivity/impedance detectors and driving electrodes, as well as for the integration of on-column, off-chip optical detection using resonance light scattering. A process-compatible latex microvalve is demonstrated and characterized. The procedure utilizes a novel packaging technique for realizing integrated fluid and electrical interfaces between the microsystem and conventional tubing/instrumentation. The microfluidic system demonstrated in this work contains some of the most commonly used components in bioanalysis systems and can be used as a platform to fabricate more sophisticated microscale bioanalysis systems for a variety of applications.