High-sensitivity nanometer-scale infrared spectroscopy using a contact mode microcantilever with an internal resonator paddle. Academic Article uri icon


  • Infrared (IR) spectroscopy is one of the most widely used techniques for identifying and characterizing materials, but is diffraction limited to a spatial resolution of no smaller than several micrometers. This paper reports IR spectroscopy with 100 nm spatial resolution, using a tunable laser whose absorption in an organic layer is measured via atomic force microscopy. Wavelength-dependent absorption in the sample results in local thermomechanical deformation, which is sensed using the sharp tip of a resonant atomic force microscope cantilever. We introduce a cantilever and system design capable of 100 nm spatial resolution and a 6 x sensitivity improvement over previous approaches.

published proceedings

  • Nanotechnology

altmetric score

  • 3

author list (cited authors)

  • Kjoller, K., Felts, J. R., Cook, D., Prater, C. B., & King, W. P.

citation count

  • 58

complete list of authors

  • Kjoller, K||Felts, JR||Cook, D||Prater, CB||King, WP

publication date

  • May 2010