ENHANCED NANOMETER-SCALE INFRARED SPECTROSCOPY WITH A CONTACT MODE MICROCANTILEVER HAVING AN INTERNAL RESONATOR PADDLE Conference Paper

abstract

• Infrared (IR) spectroscopy is one of the most widely used analytical techniques to measure the chemical composition of organic materials. IR spectra can lead to identification of specific chemical species, but the diffraction limit prohibits IR spectroscopy from probing regions smaller than about 5 m. This paper demonstrates IR spectroscopy with 100 nm spatial resolution using a tunable IR laser and a vibrating atomic force microscope cantilever. Novel microcantilevers transduce thermomechanical pulses from the laser, with a factor of 6 signal-to-noise improvement over conventional microcantilevers. We show 100 nm IR spectroscopy for chemical identification of ethylene acrylic acid (EAA) and Nylon. 2010 IEEE.

name of conference

• 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)

authors

• Felts, Jonathan

published proceedings

• MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST

author list (cited authors)

• Felts, J. R., Kjoller, K., Prater, C. B., & King, W. P.

citation count

• 3

complete list of authors

• Felts, JR||Kjoller, K||Prater, CB||King, WP

publication date

• January 2010

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  Journal

keywords

• 40 Engineering
• 4018 Nanotechnology

Digital Object Identifier (DOI)

• 10.1109/MEMSYS.2010.5442546

International Standard Book Number (ISBN) 13

• 9781424457649

start page

• 136

end page

• 139

URL

• http://dx.doi.org/10.1109/memsys.2010.5442546