HEATED ATOMIC FORCE MICROSCOPE CANTILEVERS WITH WEAR-RESISTANT ULTRANANOCRYSTALLINE DIAMOND TIPS Conference Paper

abstract

• We report a wear-resistant ultrananocrystalline diamond (UNCD) tip integrated onto a heated atomic force microscope (AFM) cantilever. The batch-fabricated UNCD tips have tip radii of about 10 nm and heights up to 7 m. The tips were wear-resistant throughout 1.2 m of scanning over a silicon grating at a force of 200 nN and a speed of 10 m/s. Under the same conditions, a silicon tip was completely destroyed. When used for thermal imaging, the UNCD tip heated cantilever has a vertical imaging resolution of 1.9 nm. Finally, we demonstrate thermal nanolithography of hundreds of nano structures of polyethylene. 2013 IEEE.

name of conference

• 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

authors

• Felts, Jonathan

published proceedings

• 26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013)

author list (cited authors)

• Kim, H. J., Moldovan, N., Felts, J. R., Somnath, S., Dai, Z., Jacobs, T., ... King, W. P.

citation count

• 1

complete list of authors

• Kim, HJ||Moldovan, N||Felts, JR||Somnath, S||Dai, Z||Jacobs, TDB||Carpick, RW||Carlisle, JA||King, WP

publication date

• January 2013

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  Journal

keywords

• Bioengineering
• Nanotechnology

Digital Object Identifier (DOI)

• 10.1109/memsys.2013.6474223

International Standard Book Number (ISBN) 13

• 978-1-4673-5655-8

start page

• 245

end page

• 248

URL

• http://dx.doi.org/10.1109/memsys.2013.6474223