HEATED ATOMIC FORCE MICROSCOPE CANTILEVERS WITH WEAR-RESISTANT ULTRANANOCRYSTALLINE DIAMOND TIPS
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We report a wear-resistant ultrananocrystalline diamond (UNCD) tip integrated onto a heated atomic force microscope (AFM) cantilever. The batch-fabricated UNCD tips have tip radii of about 10 nm and heights up to 7 μm. The tips were wear-resistant throughout 1.2 m of scanning over a silicon grating at a force of 200 nN and a speed of 10 μm/s. Under the same conditions, a silicon tip was completely destroyed. When used for thermal imaging, the UNCD tip heated cantilever has a vertical imaging resolution of 1.9 nm. Finally, we demonstrate thermal nanolithography of hundreds of nano structures of polyethylene. © 2013 IEEE.
author list (cited authors)
Kim, H. J., Moldovan, N., Felts, J. R., Somnath, S., Dai, Z., Jacobs, T., ... King, W. P.