A positive displacement micropump for microdialysis
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Miniature fluid pumps, measuring 15 × 4 × 1 mm, have been microfabricated with silicon, glass, and polyimide. Pumps have been tested with deionized water and 10% glycerol solutions as the working solutions. The pumps have been operated with a pneumatic drive or a pie-zoelectric drive. Flow rates from 0.1 to 110 μl min-1 have been achieved. The maximum pressure generated by the pumps was 56 cm of water. Pumps have been operated with a dialysis probe and with a microchannel load. The pump lifetime is limited by the degradation in the performance of the polyimide components in the pump. The power consumption was less than 1 mW at a drive frequency of 10 Hz. © 1998 Elsevier Science Ltd. All rights reserved.
author list (cited authors)
Cunneen, J., Lin, Y., Caraffini, S., Boyd, J. G., Hesketh, P. J., Lunte, S. M., & Wilson, G. S.