Microfabricated biosensors and microsystems Conference Paper uri icon


  • Microfabrication technology has been successful in producing a wide range of miniature sensors and mechanical devices. Of particular interest is the application of this technology to biological systems. For instance an immunobiosensor for a bacterial food toxin with a sensitivity of 1 ng/mL and miniature reaction chambers have been fabricated for DNA analysis sequencing by hybridization. The integration of sensors with other components, particularly fluidic devices, offers the promise of microsystems. A miniature positive displacement micropump with a flow rate of 0.1-10 L/min. has been fabricated, and tested with water as the working fluid. The future looks very promising for the continued development of these devices in a wide range of fields from environmental monitoring, medical sampling and diagnostics, to precision manufacturing systems.

name of conference

  • 1997 21st International Conference on Microelectronics. Proceedings

published proceedings

  • 1997 21st International Conference on Microelectronics. Proceedings

author list (cited authors)

  • Hesketh, P. J., Zivanovic, S., Ming, Y., Park, S., Svojanovsky, S., Cunneen, J., ... Wilson, G. S.

citation count

  • 2

complete list of authors

  • Hesketh, PJ||Zivanovic, S||Ming, Y||Park, S||Svojanovsky, S||Cunneen, J||Caraffini, S||Boyd, JG||Stetter, JR||Lunte, SM||Wilson, GS

publication date

  • January 1997