A thermodynamic field theory for anodic bonding of micro electro-mechanical systems (MEMS)
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An anodic bond is modeled as a moving nonmaterial line forming the intersection of three material surfaces representing the unbonded conductor, the unbonded insulator, and the bonded interface. Global integral equations are written for the conservation of mass, momentum, and energy, Maxwell's equations, and the second law of thermodynamics. The global equations are then localized in the volume, the material surfaces, and the nonmaterial bond line. The second law is used to determine the thermodynamic conjugates in the thermodynamic potential and the dissipation inequality. It is demonstrated that the jump in the Poynting vector across a surface is equal to the surface Joule heating due to surface electric conduction currents. 1999 Elsevier Science Ltd. All rights reserved.
