A 3-Bit Digitally Operated MEMS Rotational Accelerometer
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© 2017 IEEE. This work presents an electrostatically tunable MEMS rotational acceleration switch and its operation as a 3-bit digital rotational accelerometer. The concept of operating electrostatically tunable acceleration switches as digital MEMS accelerometers, as previously demonstrated, has been applied to rotational acceleration switches in this work leading to an ultra-low power potential alternative to MEMS gyroscopes for lower resolution applications like gaming. The sensor consists of a circular proof mass surrounded by a number of electrostatic actuators. Following a simple algorithm to sequentially turn different actuators ON or OFF, a binary search can be performed by a digital controller to find the rotational acceleration. A 3-bit prototype was successfully fabricated and operated with a resolution of 49 rad/s2 (limited by the available test setup) and full scale acceleration of 392 rad/s2.
author list (cited authors)
Kumar, V., Ramezany, A., Mazrouei, S., Jafari, R., & Pourkamali, S.