A 3-Bit Digitally Operated MEMS Rotational Accelerometer Conference Paper

abstract

• 2017 IEEE. This work presents an electrostatically tunable MEMS rotational acceleration switch and its operation as a 3-bit digital rotational accelerometer. The concept of operating electrostatically tunable acceleration switches as digital MEMS accelerometers, as previously demonstrated, has been applied to rotational acceleration switches in this work leading to an ultra-low power potential alternative to MEMS gyroscopes for lower resolution applications like gaming. The sensor consists of a circular proof mass surrounded by a number of electrostatic actuators. Following a simple algorithm to sequentially turn different actuators ON or OFF, a binary search can be performed by a digital controller to find the rotational acceleration. A 3-bit prototype was successfully fabricated and operated with a resolution of 49 rad/s2 (limited by the available test setup) and full scale acceleration of 392 rad/s2.

name of conference

• 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)

authors

• Jafari, Roozbeh

published proceedings

• 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)

author list (cited authors)

• Kumar, V., Ramezany, A., Mazrouei, S., Jafari, R., & Pourkamali, S.

citation count

• 1

complete list of authors

• Kumar, Varun||Ramezany, Alireza||Mazrouei, Saeed||Jafari, Roozbeh||Pourkamali, Siavash

publication date

• January 2017

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)  Journal

Digital Object Identifier (DOI)

• 10.1109/memsys.2017.7863602

International Standard Book Number (ISBN) 13

• 9781509050789

start page

• 1087

end page

• 1090

URL

• http://dx.doi.org/10.1109/memsys.2017.7863602