High repetition rate picosecond laser system at 1983 nm Academic Article uri icon

abstract

  • An efficient scheme to generate picosecond seed pulses at 193 nm for amplification in ArF is described. The amplifier system operates at a repetition rate of 300 Hz providing average output power of 750 mW and pulse duration below 10 ps.

author list (cited authors)

  • Tomov, I. V., Anderson, T., & Rentzepis, P. M.

citation count

  • 21

publication date

  • September 1992