High repetition rate picosecond laser system at 1983 nm
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An efficient scheme to generate picosecond seed pulses at 193 nm for amplification in ArF is described. The amplifier system operates at a repetition rate of 300 Hz providing average output power of 750 mW and pulse duration below 10 ps.
author list (cited authors)
Tomov, I. V., Anderson, T., & Rentzepis, P. M.